INRF Chemicals

The INRF provides most of the chemicals used in the operation of processes in the clean room. These include both gas and wet chemicals.

Chemical logbook
All private chemicals must be logged in the chemical logbook prior to being brought into the clean room facility. Hazardous chemicals, or chemicals not identified as acceptable in the chemical logbook, must undergo a review process before they will be allowed into the facility. For a list of acceptable chemicals, see the chemical logbook.

MSDS documents
Public copies of the MSDS for all chemicals are kept in the main gowning room of the INRF clean room. In addition, the INRF staff maintains a backup copy of all MSDS documents. A link to a searchable MSDS database is provided below.

Chemical inventory
The following is an inventory of the INRF chemical supplies. Since the chemical inventory changes from day to day, the typical and maxium amount of chemical is provided for each location.

Chemicals, sorted by location

Chemicals, sorted by type