The UCI Integrated Nanosystems Research Facility (INRF) promotes research and develops technology for integrated nanosystems, targeting areas such as biomedical, communication and networking technologies. Integrated nanosystems is a new field of research, similar in nature to MEMS (micro-electrical-mechanical systems) research, but with a different emphasis. MEMS technology uses semiconductor techniques to build microscopic mechanical devices in silicon or similar materials--typical devices are pressure transducers and accelerometers. Integrated nanosystems takes MEMS technology and integrates it with micro-scale technologies from biology, chemistry, photonics and other fields to produce hybrid integrated systems. Integrated nanosystem technology allows a much larger assortment of devices to be developed for broader applications. Industries such as life and health sciences, environmental sciences, and chemical sciences can benefit from such technology. Example devices might be a self analyzing biological assay on a chip, a self powered, communicating remote sensor, or a micro chemical factory.

Integrated nanosystems require a strong cross-disciplinary approach, a willingness to pursue new, non-traditional manufacturing techniques, and full understanding of the total needs of the technology. Whereas MEMS can be quite successful using only semiconductor based technologies and developed only by electrical engineers, integrated nanosystems requires more. Researchers from many fields must come together and work together to understand the total system requirements. Several different technologies must be developed and brought together, and a holistic approach to the system, from materials, to characterization, to final packaging must be included in the development design. This process can be called "engineering the microworld". Just as an engineered system in the macroworld integrates many different technologies together--so too is the INRF vision for the microworld.

The challanges of integrated microsystems are many, and important fundamental technologies must be developed before the field can reach its potential. For this reason, the INRF has been created. Managed by UCI, a major state university, it provides the means for developing and integrating many micro- and nano-scale technologies. INRF allows the study of issues such as the integration of different materials and processes, the development of new micromachining techniques, and the characterizations of microscale devices. For example, one recent advance at INRF has been the development of techniques for microfabricating plastic devices. Plastic microdevices are more suitable for biological and medical applications, can be used for more effective micropackage design, and allows for the development of cheaper, disposable devices. Work is underway to integrate this technology with silicon based processes to produce more functional "bio-chemical-electrical-mechanical-optical" systems for applications such as fiber optics communications switching, combinatorical chemistry, and total analysis biochemical chips.

The INRF also hopes to foster communication between traditionally distant fields such as bioscience and engineering. This is accomplished through collaborated projects, seminars, courses, and general outreach. Through collaboration on projects from different fields, and by enlisting researchers from different backgrounds, INRF hopes to develop true cross-disciplinary research. One example is a recent collaboration between cell biologists in the UCI Physiology Department, bio-photonics researchers from the UCI Beckman Laser Institute, and electrical engineers from the UCI Electrical and Computer Engineering Department to study and develop a chip-based, single cell analysis system.

Finally, INRF seeks to involve industry in the development of integrated nanosystems. This involvement comes through sponsored projects which emphasize micro- and nano-scale research. Industry collaborations provide a much needed market perspective and emphasize practical issues which academic researchers may overlook. Currently, the INRF hosts over 25 industrial collaborations which sponsor research aimed at broad areas of nanoscale technology. Examples of projects include microscale packaging development, biochip development, photonic materials characterization, communications and networking development. In addition, INRF allows industrial partners to use the facility for prototyping and processing services.

For more information on how you can access the Facility directly as well as on collaberation oppertunities, please call (949) 824-0257 or email info@inrf.uci.edu