Frequently asked questions about the INRF

What is the INRF?
The INRF, which stands for the Integrated Nanosystems Research Facility, is a clean room facility at the University of California, Irvine. It is devoted to research in integrated nanosystems--microsystems engineering that focusses on the interdisciplinary and integration aspects of microsystems. In particular, focus is paid to the issues of complete integration of materials, technologies, and functionality at the chip level. The INRF contains over 8600 square feet of clean room space (class 10,000/1,000/100) with all major semiconductor equipment, facilities, and chemicals needed to fabricate microscale devices.

Who uses the INRF?
The INRF users consist of UCI faculty, research staff, students as well as industrial researchers. The facility is a campus wide resource and is open to faculty from all campus units on an equal basis. In addition, the facility is open for industrial researchers. Interested parties should contact the INRF Administrator or Research Coordinator for more information.

Who maintains the INRF?
The INRF employs four (five) full-time development engineers and several part-time technical staff to maintain the facilities. Four full-time administrative staff are employed to manage accounts, HR, purchasing, contracts, and general administrative issues. The day to day operations are run by the cleanroom manager, the INRF Administrator, as well as the Research Cordinator and actively coordinated by the INRF Director and Associate Director.

Is the INRF safe?
Yes. Safety is the highest priority at the INRF. All INRF equipment are engineered with safety controls in accordance with UC and state safety regulations. Only trained INRF staff (not users) are permitted to perform maintenance on equipment, gases, or facilities. The INRF provides safety training for all users. Safety equipment and personal protection equipment (PPE) are provided for all users at no additionl charge. Strict usage policies minimize user exposure to hazardous materials and conditions. Chemical accounting and waste management are performed by INRF staff, and is handled according to UC and state regulations. The INRF maintains a pro-active, safe minded environment, and we believe ours is one of the safest laboratories on campus.

Does it cost money to use the INRF?
The INRF charges for access to the facility. The usage rate varies depending on whether the user is affiliated with UCI, other campuses, or are industrial users. All users must pay for access as well as specific use of the equipment. In addition, a one time fee is assessed to every new user to cover initial orientation costs and training services. For latest fee schedule click here.

What do I get if I become an INRF user?
INRF users enjoy access privilages to use the facility at any time. Users have access to training and certification on all fabrication tools, and may use any tool for which they are certified. The INRF provides commonly used process chemicals (including acids, bases, photoresists, developers), and takes care of waste management for these chemicals. In addition, the INRF provides clean room garments, and all safety equipment (including gloves, goggles, etc.).

What about intellectual property?
Intellectual property issues are well developed by the University of California and the INRF adheres to the UC policies. The basic rule of thumb is this: If your work involved UCI students, staff or faculty in an collaborative way, then any IP resulting from the work is shared or owned by UCI. If work was developed without UCI personnel (e.g., INRF staff provided only cursory assistance in development) then the IP belongs to you. Generally, research contracts, gifts and grants are considered collaborative work, and UCI owns the IP resulting from such efforts. Any IP resulting from the work of a UCI employee or student at UCI is considered UCI property.

The best way to ensure exclusive IP ownership is to use the facility as an "outside user"--a fee based usage that allows you to use the facility without disclosing the details of your research (subject to reasonable safety requirements).

It is the policy of INRF staff not to disclose details of processes or work performed to assist users without the expressed consent of the user.

How does the INRF train users?
The INRF provides a basic safety course and an orientation of the facility. In addition, the INRF staff will provide technical assistance in the use of the processing equipment. Most equipment training is performed by "superusers", INRF student users who have mastered the use of the equipment. Certification is required to use the equipment, and all equipment certification is performed by INRF staff (not superusers). INRF staff will not train users in fabrication procedures.

Will the INRF teach me to build microdevices?
The INRF does not provide fabrication training--that is considered the responsibility of individual faculty. The INRF will support training in the basic use of equipment, but it is up to the user to design and develop the fabrication procedure needed to achieve success. Many students learn much by discussing their problems with their professors, supervisors and other INRF users. INRF staff will provide friendly advice, but will not take on the research efforts of the users.

How can I learn how to build microdevices?
Faculty affiliated with the INRF usually have expertise in microfabrication techniques, and students are encouraged to contact the appropriate professor. In addition, several courses are offered by UCI in the techniques of microfabrication, including one hands-on laboratory course in the INRF clean room.

Will the INRF build something for me?
The INRF will perform a few basic fabrication procedures for a fee, such as etching, deposition, and basic lithography (standard process, one mask only). To perform complex processes, or to design and develop a fabrication processes, the interested party must contract to the INRF for a specific job. If the work is research in nature, it will be more appropriate to contact INRF affiliated faculty to perform the work instead. Contact the INRF research coordinator for more information.

Where do I keep my things?
The INRF provides each user with a clean room box to store tools and materials. The user boxes may be stored in the entrance to the gowning room. In special cases, additional storage space may be made available to users. Contact the lab manager for details.

Where do I get tweezers, wafers and that sort of stuff?
The INRF keeps up to date catalogs and databases of vendors for semiconductor and related applications. In addition, the INRF stocks commonly needed materials for resale to users. Items are sold at a 25% markup over retail to cover INRF purchasing, handling and storage overhead.

Can I set up my own experiment in the INRF?
The INRF is is a shared fabrication facility, not a laboratory. Users may perform basic fabrication processes in the facility (such as etching, cleaning, etc.), but may not use the facility to perform chemical or other experiments. Refer to the INRF training and policy documents for details about what is and is not allowed.

How is the INRF supported?
The bulk of the INRF operating budget comes from user fees, INRF service contracts, and research contracts. A portion of the operations are supported by education and research initiatives from the University.