INRF Status Monitoring
The status of the INRF is reported on this web page. The lab manager
may post updates here regarding the status of equipment and other
clean room faciltities. In addition, you may identify who is in the
clean room at any time.
INRF user monitoring
Click here
to see who is currently logged into the clean room. (Requires username and password.)
INRF announcements
Click here
to find the most recent updates from the INRF staff.
INRF equipment
Click on the links below to follow the status on selected pieces of equipment.
Some equipment web pages allow online scheduling.
INRF webcams
Click on the links below to see the most up to date photos from the clean room.
Be sure to click your "refresh" button to get the latest picture.
[Note: not all web cams are currently activated.]
- EGW 2311: Lab manager's room
- EGW 2315: Characterization room
- EGW 2315A: Electroplating room
- EGW 2318: Back-end processing room
- EGW 2320: Wet processing room
- EGW 2321: SEM room
- EGW 2324: Gowning room
- EGW 2326: LPCVD room
- EGW 2329: Polymer room
- EGW 2332: Lithography #1 room
- EGW 2333: Dry etching room
- EGW 2338: Lithography #2 room
- EGW 2339: Metallization room
- EGW 2344: Lithography #3 room
- EGW 2345: Diffusion room
