| INRF user orientation |
|
| Effective October
01, 2008 |
|
| (If tools are
operated by staff, then staff time charge are applied in addition to tool
time.) |
|
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| |
|
UCI User |
Commercial
User |
Annual User |
Academic User
(Non UCI) |
|
| Event
description |
Min |
Rate |
Cap |
Rate |
Cap |
Rate |
Cap |
Rate |
Cap |
|
| Clean
room usage |
|
$
20.00 |
$1,000/mo |
$
80.00 |
|
|
$4,800/mo |
$
25.00 |
$1,250/mo |
|
| Combine
usage |
|
$
20.00 |
$1,200/mo |
|
|
|
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|
|
|
| INRF user orientation |
1
hr |
$500.00 |
$500/mo |
$ 750.00 |
$750/mo |
$ 750.00 |
$750/mo |
$ 500.00 |
$500/mo |
|
| Staff time |
1
hr |
$ 75.00 |
|
$ 175.00 |
|
$ 175.00 |
|
$ 100.00 |
|
|
| Hazardous waste disposal / liter |
|
$ 10.00 |
|
$ 10.00 |
|
$ 10.00 |
|
$ 10.00 |
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| |
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|
|
| E-Beam 1 evaporation |
3
hr |
$ 15.00 |
|
$ 25.00 |
|
$ 15.00 |
|
$ 25.00 |
|
|
| CHA Thermal Evaporation |
3
hr |
$ 15.00 |
|
$ 25.00 |
|
$ 15.00 |
|
$ 25.00 |
|
|
| Plasma-Therm RIE |
0.5
hr |
$ 30.00 |
|
$ 40.00 |
|
$ 30.00 |
|
$ 40.00 |
|
|
| Plasma-Therm PECVD |
1
hr |
$ 20.00 |
|
$ 30.00 |
|
$ 20.00 |
|
$ 30.00 |
|
|
| PE 2400-A Sputtering |
3
hr |
$ 15.00 |
|
$ 25.00 |
|
$ 15.00 |
|
$ 25.00 |
|
|
| PE 2400-B Sputtering |
3
hr |
$ 15.00 |
|
$ 25.00 |
|
$ 15.00 |
|
$ 25.00 |
|
|
| Technics II 500 |
|
$ 15.00 |
|
$ 25.00 |
|
$ 15.00 |
|
$ 25.00 |
|
|
| Quintel Mask Aligner |
|
$ 20.00 |
|
$ 30.00 |
|
$ 20.00 |
|
$ 30.00 |
|
|
| STS System DRIE |
|
$ 35.00 |
|
$ 45.00 |
|
$ 35.00 |
|
$ 45.00 |
|
|
| SEM - 4700 Hitachi / EDAX |
|
$ 40.00 |
|
$ 50.00 |
|
$ 40.00 |
|
$ 50.00 |
|
|
| Anicon LTO System |
3
hr |
$ 20.00 |
|
$ 30.00 |
|
$ 20.00 |
|
$ 30.00 |
|
|
| BMR Low Temp PECVD System |
0.5
hr |
$ 20.00 |
|
$ 30.00 |
|
$ 20.00 |
|
$ 30.00 |
|
|
| Solitec spinner |
|
$ 20.00 |
|
$ 30.00 |
|
$ 20.00 |
|
$ 30.00 |
|
|
| K&S 780 Dicing Saw |
|
$ 20.00 |
|
$ 35.00 |
|
$ 20.00 |
|
$ 35.00 |
|
|
| ICP & RIE Trion |
0.5
hr |
$ 20.00 |
|
$ 30.00 |
|
$ 20.00 |
|
$ 30.00 |
|
|
| HS200 Confocal Microscope/Profiler |
|
$ 15.00 |
|
$ 25.00 |
|
$ 15.00 |
|
$ 25.00 |
|
|
| Wire Bonder |
|
$ 20.00 |
|
$ 35.00 |
|
$ 20.00 |
|
$ 35.00 |
|
|
| Gasonics Downstream Plasma Ashing |
|
$ 20.00 |
|
$ 30.00 |
|
$ 20.00 |
|
$ 30.00 |
|
|
| Heatpulse 610 RTA |
|
$ 20.00 |
|
$ 30.00 |
|
$ 20.00 |
|
$ 30.00 |
|
|
| E-Beam 2 evaporation |
3
hr |
$ 15.00 |
|
$ 25.00 |
|
$ 15.00 |
|
$ 25.00 |
|
|
| PE 4400 Sputtering (Staff tool) |
3
hr |
$ 15.00 |
|
$ 25.00 |
|
$ 15.00 |
|
$ 25.00 |
|
|
| Kasper Mask Aligner (Staff tool) |
|
$ 20.00 |
|
$ 30.00 |
|
$ 20.00 |
|
$ 30.00 |
|
|
| Karl Suss MA6 Mask Aligner (Staff tool) |
|
$ 25.00 |
|
$ 35.00 |
|
$ 25.00 |
|
$ 35.00 |
|
|
| Canon i4 4000 Stepper (Staff tool) |
|
$150.00 |
|
$ 160.00 |
|
$ 150.00 |
|
$ 150.00 |
|
|
| Gardner ellipsometer (Staff tool) |
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| Stress measurement tool
(Staff tool) |
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| Dektak profilometer
(Staff tool) |
|
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| Furnaces (oxidation, sintering, etc) |
|
|
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|
| PDS 2010 Parylene coater |
1
hr |
$ 20.00 |
|
$ 25.00 |
|
$ 20.00 |
|
$ 25.00 |
|
|
| Tousimis 815C CPD |
1
hr |
$ 25.00 |
|
$ 30.00 |
|
$ 25.00 |
|
$ 30.00 |
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| |
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| User store |
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|
|
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| ASM LPCVD System (low-stress nitride, poly) |
|
|
|
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| E-beam lithography (Staff
or superuser tool) |
|
$125.00 |
$6,000/yr |
$ 200.00 |
|
$ 125.00 |
$40,000/yr |
$ 200.00 |
|
|
| Foundry service |
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| Adjustment |
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| INRF course fees |
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| Ion Milling |
3
hr |
$ 15.00 |
|
$ 25.00 |
|
$ 25.00 |
|
$ 15.00 |
|
|
| 4" dry oxidation, the sintering and the long anneal
furnaces |
0.5
hr |
$ 10.00 |
|
$ 15.00 |
|
$ 15.00 |
|
$ 10.00 |
|
|
| 6" mini
brute thermal bonding furnace |
0.5
hr |
$ 10.00 |
|
$ 15.00 |
|
$ 15.00 |
|
$ 10.00 |
|
|
| 4" mini
brute |
0.5
hr |
$ 10.00 |
|
$ 15.00 |
|
$ 15.00 |
|
$ 10.00 |
|
|
| UV flood
exposure system |
1
hr |
$ 15.00 |
|
$ 15.00 |
|
$ 15.00 |
|
$ 15.00 |
|
|
| Karl Suess
MJB 3 |
1
hr |
$ 15.00 |
|
$ 15.00 |
|
$ 15.00 |
|
$ 15.00 |
|
|
| Plasma line asher |
1
hr |
$ 15.00 |
|
$ 15.00 |
|
$ 15.00 |
|
$ 15.00 |
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