INRF Equipment List
The following is a list of equipment available for use at the INRF.
Items with one asterick (*) require special permission to use (level-4 tools).
For use of items with two astericks, contact the INRF. If a listing has a link,
then a separate web page is maintained for that tool. For information on which
tools are down for maintenance, see the status page.
Photolithography
Thin film deposition and material growth
Dry etching
Wet etching
Furnaces and ovens
- Heatpulse 610 RTA
- Box furnace
- Many process ovens (Blue-M)
- Thermco 6" four-tube Furnaces (LPCVD of oxide, nitride, etc.)
- Thermco Minibrute Diffusion Furnace
- TranTemp 2" dia. semi-transparent tube Furnace
- Cincinnati Sub-Zero environmental testing chamber
- Lindberg 3" dia. Tube Furnace
- Blue M (SPX) oven
Packaging
Sample preparation
- Ultra Tech Inc. 4000 rpm Diamond Saw
- Buehler Isomet 11-1180-160 Low Speed Saw
- Metals Research LTD. Multipol 2 Polisher
- K&S 775 Dicing Saw
- Signatone Angle Lapping Machine 1100
- Tempress 602 dicing saw
- SBT 920 lapping/polishing
- Buehler Ecomet3 grinder/polisher
- Tousimis Autosamdri 815B series C Supercritical Point Dryer System
Analytical equipment
|
