INRF training
The INRF recognizes and provides several levels of training.
The most fundamental training are UCI(EH&S) Lab Safety and INRF Orientation training, and are
mandatory for all users wishing to use the INRF clean room.
Both the safety and orientation training
are offered once per month for new and
continuing users. There is a one-time fee for the INRF Orientation Training. UCI
safety training is provided periodically. The INRF staff will
inform the users when new UCI safety classes are offered.
For more information about equipment specific training, contact
the INRF staff, or see the
web pages for the tools.
User training levels are designated in the following manner:
- Level-1 UCI and INRF safety and policy training
Required for all personnel using the clean room. Provided
by UCI and INRF staff. Covers use of simple equipment
such as microscopes, hotplates, etc. Also covers use of the wet benches for
most wet chemical processes.
- Level-2 User assisted training, without INRF certification
Required for low level (level-2) tools. Proficient users
or faculty train new users to use tools properly. INRF
certification is not required. Covers use of relatively simple
process equipment such as spinner, aligner, profilometer, etc. Does not
require direct INRF staff certification, though the INRF staff may deny a
user the right to use equipment if they fail to use it properly.
- Level-3 Superuser assisted training, with INRF certification
Required on high-level (level-3) tools. Superusers or INRF
staff train users to use tool properly. Certification by INRF
staff on the proper use of the tool is required.
Covers use of relatively complex and expensive process equipment such as
plasma tools, evaporators, sputterers, etc. The INRF staff may deny a user
the right to use equipment if they fail to use it properly.
- Level-4 Specialized training
Required for certain specialized (or expensive) tools. Special
training is provided by INRF staff or consultant training
experts only. Training is by appointment only and may incurr
additional costs. Covers use of very complex, dangerous or expensive
process equipment such as thermal oxidation units, stepper systems,
and ultra high resolution lithography systems. See the INRF lab manager
for more details.
Different training levels (1-4) are required to use different tools.
To receive training
on a tool, contact the INRF staff for more information. Training may also be
provided by superusers (users who are experienced in the use of the tool). However,
certification must be performed by the INRF staff. INRF staff are
available to assist new users when operating the tools, however, they are
not free to perform processing or optimization on behalf of users. That is
considered the responsibility of the users.
The INRF does not provide process training. Users are responsible
for understanding their own processes and optimizing their recipes. INRF
staff are generally knowledgeable about common fabrication procedures,
however, and
may offer friendly advice. Other INRF users may also be of help to the
novice user in process development. The INRF cannot assume responsibility
for the success or failure of a fabrication process. The role of the
INRF is to provide access to processing tools.
Further training (e.g., process development) may be obtained from UCI
faculty directly or through courses offered by the university. In addition, the
INRF web site provides links to common process
recipes used by researchers at the facility.