Training Schedule Courses

INRF training

The INRF recognizes and provides several levels of training. The most fundamental training are UCI(EH&S) Lab Safety and INRF Orientation training, and are mandatory for all users wishing to use the INRF clean room. Both the safety and orientation training are offered once per month for new and continuing users. There is a one-time fee for the INRF Orientation Training. UCI safety training is provided periodically. The INRF staff will inform the users when new UCI safety classes are offered. For more information about equipment specific training, contact the INRF staff, or see the web pages for the tools.

User training levels are designated in the following manner:

  • Level-1 UCI and INRF safety and policy training
    Required for all personnel using the clean room. Provided by UCI and INRF staff. Covers use of simple equipment such as microscopes, hotplates, etc. Also covers use of the wet benches for most wet chemical processes.

  • Level-2 User assisted training, without INRF certification
    Required for low level (level-2) tools. Proficient users or faculty train new users to use tools properly. INRF certification is not required. Covers use of relatively simple process equipment such as spinner, aligner, profilometer, etc. Does not require direct INRF staff certification, though the INRF staff may deny a user the right to use equipment if they fail to use it properly.

  • Level-3 Superuser assisted training, with INRF certification
    Required on high-level (level-3) tools. Superusers or INRF staff train users to use tool properly. Certification by INRF staff on the proper use of the tool is required. Covers use of relatively complex and expensive process equipment such as plasma tools, evaporators, sputterers, etc. The INRF staff may deny a user the right to use equipment if they fail to use it properly.

  • Level-4 Specialized training
    Required for certain specialized (or expensive) tools. Special training is provided by INRF staff or consultant training experts only. Training is by appointment only and may incurr additional costs. Covers use of very complex, dangerous or expensive process equipment such as thermal oxidation units, stepper systems, and ultra high resolution lithography systems. See the INRF lab manager for more details.

Different training levels (1-4) are required to use different tools. To receive training on a tool, contact the INRF staff for more information. Training may also be provided by superusers (users who are experienced in the use of the tool). However, certification must be performed by the INRF staff. INRF staff are available to assist new users when operating the tools, however, they are not free to perform processing or optimization on behalf of users. That is considered the responsibility of the users.

The INRF does not provide process training. Users are responsible for understanding their own processes and optimizing their recipes. INRF staff are generally knowledgeable about common fabrication procedures, however, and may offer friendly advice. Other INRF users may also be of help to the novice user in process development. The INRF cannot assume responsibility for the success or failure of a fabrication process. The role of the INRF is to provide access to processing tools.

Further training (e.g., process development) may be obtained from UCI faculty directly or through courses offered by the university. In addition, the INRF web site provides links to common process recipes used by researchers at the facility.

Copyright 2000, 2001 University of California Regents